High frequency MoS2 nanomechanical resonators

ACS Nano. 2013 Jul 23;7(7):6086-91. doi: 10.1021/nn4018872. Epub 2013 Jun 14.

Abstract

Molybdenum disulfide (MoS2), a layered semiconducting material in transition metal dichalcogenides (TMDCs), as thin as a monolayer (consisting of a hexagonal plane of Mo atoms covalently bonded and sandwiched between two planes of S atoms, in a trigonal prismatic structure), has demonstrated unique properties and strong promises for emerging two-dimensional (2D) nanodevices. Here we report on the demonstration of movable and vibrating MoS2 nanodevices, where MoS2 diaphragms as thin as 6 nm (a stack of 9 monolayers) exhibit fundamental-mode nanomechanical resonances up to f0 ~ 60 MHz in the very high frequency (VHF) band, and frequency-quality (Q) factor products up to f0 × Q ~ 2 × 10(10)Hz, all at room temperature. The experimental results from many devices with a wide range of thicknesses and lateral sizes, in combination with theoretical analysis, quantitatively elucidate the elastic transition regimes in these ultrathin MoS2 nanomechanical resonators. We further delineate a roadmap for scaling MoS2 2D resonators and transducers toward microwave frequencies. This study also opens up possibilities for new classes of vibratory devices to exploit strain- and dynamics-engineered ultrathin semiconducting 2D crystals.

Publication types

  • Research Support, Non-U.S. Gov't
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Equipment Design
  • Equipment Failure Analysis
  • Materials Testing
  • Micro-Electrical-Mechanical Systems / instrumentation*
  • Molybdenum / chemistry*
  • Nanostructures / chemistry*
  • Nanostructures / ultrastructure*
  • Nanotechnology / instrumentation*
  • Particle Size
  • Semiconductors
  • Sulfides / chemistry*
  • Transducers*
  • Vibration

Substances

  • Sulfides
  • Molybdenum