Highly efficient color filter array using resonant Si3N4 gratings

Opt Express. 2013 May 20;21(10):12495-506. doi: 10.1364/OE.21.012495.

Abstract

We demonstrate the design and fabrication of a highly efficient guided-mode resonant color filter array. The device is designed using numerical methods based on rigorous coupled-wave analysis and is patterned using UV-laser interferometric lithography. It consists of a 60-nm-thick subwavelength silicon nitride grating along with a 105-nm-thick homogeneous silicon nitride waveguide on a glass substrate. The fabricated device exhibits blue, green, and red color response for grating periods of 274, 327, and 369 nm, respectively. The pixels have a spectral bandwidth of ~12 nm with efficiencies of 94%, 96%, and 99% at the center wavelength of blue, green, and red color filter, respectively. These are higher efficiencies than reported in the literature previously.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Color*
  • Colorimetry / instrumentation*
  • Equipment Design
  • Equipment Failure Analysis
  • Filtration / instrumentation*
  • Refractometry / instrumentation*
  • Silicon Compounds / chemistry*

Substances

  • Silicon Compounds
  • silicon nitride