Profile measurement of glass sheet using multiple wavelength backpropagation interferometry

Appl Opt. 2013 Jun 1;52(16):3726-31. doi: 10.1364/AO.52.003726.

Abstract

Multiple-wavelength backpropagation interferometry based on a spectral interferometer is proposed for measuring thin glass sheets with nanometer accuracy. The multiwavelength backpropagation method introduced to the spectral interferometer eliminates time-encoded wavelength sweeping and mechanical scanning, which enables high-speed profile measurements. The applicability of the proposed method is experimentally demonstrated through cross-sectional profile and vibrating surface displacement measurements of a glass sheet.