Waferscale nanophotonic circuits made from diamond-on-insulator substrates

Opt Express. 2013 May 6;21(9):11031-6. doi: 10.1364/OE.21.011031.

Abstract

Wide bandgap dielectrics are attractive materials for the fabrication of photonic devices because they allow broadband optical operation and do not suffer from free-carrier absorption. Here we show that polycrystalline diamond thin films deposited by chemical vapor deposition provide a promising platform for the realization of large scale integrated photonic circuits. We present a full suite of photonic components required for the investigation of on-chip devices, including input grating couplers, millimeter long nanophotonic waveguides and microcavities. In microring resonators we measure loaded optical quality factors up to 11,000. Corresponding propagation loss of 5 dB/mm is also confirmed by measuring transmission through long waveguides.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Diamond / chemistry*
  • Electric Conductivity
  • Electronics / instrumentation*
  • Equipment Design
  • Equipment Failure Analysis
  • Nanoparticles / chemistry*
  • Nanotechnology / instrumentation*
  • Refractometry / instrumentation*
  • Surface Plasmon Resonance / instrumentation*

Substances

  • Diamond