Highly ordered Pb(Zr₀.₅₂ Ti₀.₄₈)O₃ piezoelectric nanorod arrays

Nanotechnology. 2013 Jun 7;24(22):225303. doi: 10.1088/0957-4484/24/22/225303. Epub 2013 May 1.

Abstract

One-dimensional (1D) piezoelectric nanostructures have attracted significant attention for a broad range of applications including optoelectronics, thermoelectrics, electrochemical and electromechanical converters. We demonstrate the synthesis of 1D nanostructures based upon Pb(Zr0.52Ti0.48)O3 (PZT) on conductive substrates via sol-gel template synthesis. The vertically aligned PZT nanostructures with heights around one micron were synthesized by vacuum infiltration of sol-gel precursors into highly ordered cylindrical pores of anodized aluminum oxide templates. The 1D nanostructures were developed on large scale platinized silicon wafers and exhibited dense rod-like structure with a uniform diameter of 90 nm and an aspect ratio of 10. Scanning probe microscopy conducted on individual nanorods demonstrated good electromechanical properties with a high piezoelectric magnitude of 41 pm V(-1). We believe that this study opens the possibility of developing high performance nanoscale piezoelectric sensors and transducers.

Publication types

  • Research Support, Non-U.S. Gov't
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Electricity
  • Nanotechnology
  • Nanotubes / chemistry*
  • Nanotubes / ultrastructure*
  • Oxides / chemistry*
  • Phase Transition
  • Titanium / chemistry*
  • Transducers
  • Zirconium / chemistry*

Substances

  • Oxides
  • Zirconium
  • Titanium