In this study, a facile route to fabricate micropatterns of cells is presented on the basis of electron irradiation of poly(dimethylsiloxane) (PDMS). PDMS films were irradiated with electron beams through a pattern mask with micrometer-sized grids. After irradiation, the changes in the chemical composition, morphology, and wettability of the PDMS surface were investigated by using an X-ray photoelectron spectrometer, an atomic force microscope, and a contact anglometer. The results of the surface analysis revealed that the hydrophobic PDMS surface was changed into a hydrophilic one by the electron irradiation. Furthermore, on the basis of cell culturing on the selectively-irradiated PDMS, cells such as NIH3T3 and L929 were selectively adhered to and proliferated on the irradiated regions of the PDMS surface, resulting in the micropatterns of the cells on the PDMS surface.