Noninvasive spatial metrology of single-atom devices

Nano Lett. 2013 May 8;13(5):1903-9. doi: 10.1021/nl303863s. Epub 2013 Apr 18.

Abstract

The exact location of a single dopant atom in a nanostructure can influence or fully determine the functionality of highly scaled transistors or spin-based devices. We demonstrate here a noninvasive spatial metrology technique, based on the microscopic modeling of three electrical measurements on a single-atom (phosphorus in silicon) spin qubit device: hyperfine coupling, ground state energy, and capacitive coupling to nearby gates. This technique allows us to locate the qubit atom with a precision of ±2.5 nm in two directions and ±15 nm in the third direction, which represents a 1500-fold improvement with respect to the prefabrication statistics obtainable from the ion implantation parameters.

Publication types

  • Research Support, Non-U.S. Gov't
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Nanostructures / chemistry*
  • Phosphorus / chemistry*
  • Silicon / chemistry

Substances

  • Phosphorus
  • Silicon