Optomechanical and photothermal interactions in suspended photonic crystal membranes

Opt Express. 2013 Mar 25;21(6):7258-75. doi: 10.1364/OE.21.007258.

Abstract

We present here an optomechanical system fabricated with novel stress management techniques that allow us to suspend an ultrathin defect-free silicon photonic-crystal membrane above a Silicon-on-Insulator (SOI) substrate with a gap that is tunable to below 200 nm. Our devices are able to generate strong attractive and repulsive optical forces over a large surface area with simple in- and out- coupling and feature the strongest repulsive optomechanical coupling in any geometry to date (gOM/2π ≈65 GHz/nm). The interplay between the optomechanical and photo-thermal-mechanical dynamics is explored, and the latter is used to achieve cooling and amplification of the mechanical mode, demonstrating that our platform is well-suited for potential applications in low-power mass, force, and refractive-index sensing as well as optomechanical accelerometry.

Publication types

  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Crystallization
  • Equipment Design
  • Equipment Failure Analysis
  • Hot Temperature
  • Light
  • Membranes, Artificial*
  • Micro-Electrical-Mechanical Systems / instrumentation*
  • Refractometry / instrumentation*
  • Silicon / chemistry*
  • Transducers*

Substances

  • Membranes, Artificial
  • Silicon