A novel offset cancellation based on parasitic-insensitive switched-capacitor sensing circuit for the out-of-plane single-Gimbaled decoupled CMOS-MEMS gyroscope

Ming-Hui Chang; Han-Pang Huang

doi:10.3390/s130303568

A novel offset cancellation based on parasitic-insensitive switched-capacitor sensing circuit for the out-of-plane single-Gimbaled decoupled CMOS-MEMS gyroscope

Sensors (Basel). 2013 Mar 14;13(3):3568-87. doi: 10.3390/s130303568.

Authors

Ming-Hui Chang¹, Han-Pang Huang

Affiliation

¹ Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan. d93522037@ntu.edu.tw

Abstract

This paper presents a novel parasitic-insensitive switched-capacitor (PISC) sensing circuit design in order to obtain high sensitivity and ultra linearity and reduce the parasitic effect for the out-of-plane single-gimbaled decoupled CMOS-MEMS gyroscope (SGDG). According to the simulation results, the proposed PISC circuit has better sensitivity and high linearity in a wide dynamic range. Experimental results also show a better performance. In addition, the PISC circuit can use signal processing to cancel the offset and noise. Thus, this circuit is very suitable for gyroscope measurement.

Publication types

Research Support, Non-U.S. Gov't

MeSH terms

Equipment Design
Micro-Electrical-Mechanical Systems*
Semiconductors*