Method for characterization of Si waveguide propagation loss

Opt Express. 2013 Mar 11;21(5):5391-400. doi: 10.1364/OE.21.005391.

Abstract

A new method for measuring waveguide propagation loss in silicon nanowires is presented. This method, based on the interplay between traveling ring modes and standing wave modes due to back-scattering from edge roughness, is accurate and can be used for on wafer measurement of test structures. Examples of loss measurements and fitting are reported.

Publication types

  • Research Support, Non-U.S. Gov't