Here we report thermal evaporation dynamics of Au nanoparticles on single crystal oxide substrates, including MgO, SrTiO(3), and Al(2)O(3). The size reduction rate of Au nanoparticles via thermal treatments is strongly dependent on not only temperature but also pressure. Lowering the pressure of inert Ar gas from 10(5) to 10 Pa increases the size reduction rate over 30 times in the temperature range 800 °C-950 °C. The temperature dependence is solely due to the variation of saturated vapor pressure of Au, whereas the pressure dependence of the surrounding inert gas can be interpreted in terms of a pressure dependence on a gas-phase diffusion of evaporated Au atoms into the surroundings. We present a simplified model to explain an evaporation dynamics, which well describes the pressure dependence on a size reduction rate of Au nanoparticles. By utilizing this useful pressure-induced evaporation dynamics, we succeeded in manipulating a size reduction of Au nanoparticle arrays down to -10 nm diameter range from -300 nm initial size by programming sequentially a surrounding pressure.