Sub-15 nm Au nanoparticles have been fabricated on a nanostructured Ag surface at room temperature via a liquid-phase chemical deposition upon excitation of the localized surface plasmon resonance (SPR). Measurement of the SPR-mediated photothermal local heating of the substrate surface by a molecular thermometry strategy indicated the temperature to be above 230 °C, which led to an efficient decomposition of CH(3)AuPPh(3) to form Au nanoparticles on the Ag surface. Particle sizes were tunable between 3 and 10 nm by adjusting the deposition time. A surface-limited growth model for Au nanoparticles on Ag is consistent with the deposition kinetics.