Complex refractive index variation in proton-damaged diamond

Opt Express. 2012 Aug 13;20(17):19382-94. doi: 10.1364/OE.20.019382.

Abstract

An accurate control of the optical properties of single crystal diamond during microfabrication processes such as ion implantation plays a crucial role in the engineering of integrated photonic devices. In this work we present a systematic study of the variation of both real and imaginary parts of the refractive index of single crystal diamond, when damaged with 2 and 3 MeV protons at low-medium fluences (range: 10(15) - 10(17) cm(-2)). After implanting in 125 × 125 μm(2) areas with a scanning ion microbeam, the variation of optical pathlength of the implanted regions was measured with laser interferometric microscopy, while their optical transmission was studied using a spectrometric set-up with micrometric spatial resolution. On the basis of a model taking into account the strongly non-uniform damage profile in the bulk sample, the variation of the complex refractive index as a function of damage density was evaluated.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Computer Simulation
  • Diamond / chemistry*
  • Diamond / radiation effects*
  • Light
  • Models, Chemical*
  • Protons
  • Refractometry / methods*
  • Scattering, Radiation

Substances

  • Protons
  • Diamond