MZI optical isolator with Si-wire waveguides by surface-activated direct bonding

Opt Express. 2012 Jul 30;20(16):18440-8. doi: 10.1364/OE.20.018440.

Abstract

We fabricate a Mach-Zehnder interferometer-based optical isolator using a silicon-wire waveguide with magneto-optic garnet cladding using direct bonding techniques. Using Si-wire waveguides, the size of the device is greatly reduced from that of our previous device. We investigate surface-activated direct bonding with nitrogen plasma treatment, which shows better bonding results than oxygen plasma treatment. A large magneto-optic phase shift of 0.8π and an optical isolation of 18 dB are obtained at a wavelength of 1322 nm.

Publication types

  • Research Support, Non-U.S. Gov't