Efficient light coupling into in-plane semiconductor nanomembrane photonic devices utilizing a sub-wavelength grating coupler

Opt Express. 2012 Aug 27;20(18):20659-65. doi: 10.1364/OE.20.020659.

Abstract

We report a subwavelength grating (SWG) coupler for coupling light efficiently into in-plane semiconductor nanomembrane photonic devices for the first time. The SWG coupler consists of a periodic array of rectangular trenches fabricated on a silicon nanomembrane (SiNM) transferred onto a glass substrate. At a wavelength of 1555.56 nm, the coupling efficiency of the fabricated 10 µm wide, 17.1 µm long SWG is 39.17% (-4.07 dB), with 1 dB and 3 dB bandwidths of 29 nm and 57 nm, respectively. Peak efficiency varies by 0.26 dB when measuring 5 fabricated grating pairs. Coupling efficiency can further be improved with an improved SiNM transfer process. Such high efficiency couplers allow for the successful realization of a plethora of hybrid photonic devices utilizing nanomembrane technology.

Publication types

  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Energy Transfer
  • Equipment Design
  • Equipment Failure Analysis
  • Membranes, Artificial*
  • Nanostructures / chemistry*
  • Nanotechnology / instrumentation*
  • Refractometry / instrumentation*
  • Semiconductors*

Substances

  • Membranes, Artificial