Hydrogen sensors built with individual palladium nanowires (Pd NWs) have been achieved by integrating Pd NWs across microelectromechanical system (MEMS) electrodes, followed by assembling and bonding them to a chip carrier platform. The sensing measurements reveal that the sensors with individual Pd NWs show reverse sensing behaviors between the temperature zones of (370-263 K) and (263-120 K).
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