Ultraviolet stimulated electron source for use with low energy plasma instrument calibration

Rev Sci Instrum. 2012 Jul;83(7):073308. doi: 10.1063/1.4732810.

Abstract

We have developed and demonstrated a versatile, compact electron source that can produce a mono-energetic electron beam up to 50 mm in diameter from 0.1 to 30 keV with an energy spread of <10 eV. By illuminating a metal cathode plate with a single near ultraviolet light emitting diode, a spatially uniform electron beam with 15% variation over 1 cm(2) can be generated. A uniform electric field in front of the cathode surface accelerates the electrons into a beam with an angular divergence of <1° at 1 keV. The beam intensity can be controlled from 10 to 10(9) electrons cm(-2) s(-1).