An in-situ electrical conductivity measurement of thin films of tin oxide nanoclusters for nano-devices was performed during metal cluster deposition and subsequent oxidation. From the current observation, the percolation threshold and the oxidation process are suggested. During baking at 200 degrees C, tin nanoclusters were transformed into low-conductivity stannous oxide and then into high-conductivity stannic oxide. From electron micrographs, it is suggested that the baking procedure is responsible for changing the oxide state and/or the crystallinity of the individual nanoclusters rather than changing the morphology of the film.