Linear variable optical filter-based ultraviolet microspectrometer

Appl Opt. 2012 Jul 1;51(19):4308-15. doi: 10.1364/AO.51.004308.

Abstract

An IC-compatible linear variable optical filter (LVOF) for application in the UV spectral range between 310 and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A special calibration technique has been employed that is based on an initial spectral measurement on a xenon lamp. The image recorded on the camera during calibration is used in a signal processing algorithm to reconstruct the spectrum of the mercury lamp and the calibration data is subsequently used in UV spectral measurements. Experiments on a fabricated LVOF-based microspectrometer with this calibration approach implemented reveal a spectral resolution of 0.5 nm.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Algorithms
  • Calibration
  • Computer Simulation
  • Computer-Aided Design
  • Equipment Design
  • Microspectrophotometry / instrumentation*
  • Miniaturization
  • Models, Theoretical
  • Optical Devices
  • Ultraviolet Rays