Critically coupled silicon Fabry-Perot photodetectors based on the internal photoemission effect at 1550 nm

Opt Express. 2012 May 21;20(11):12599-609. doi: 10.1364/OE.20.012599.

Abstract

In this paper, design, fabrication and characterization of an all-silicon photodetector (PD) at 1550 nm, have been reported. Our device is a surface-illuminated PD constituted by a Fabry-Perot microcavity incorporating a Cu/p-Si Schottky diode. Its absorption mechanism, based on the internal photoemission effect (IPE), has been enhanced by critical coupling condition. Our experimental findings prove a peak responsivity of 0.063 mA/W, which is the highest value obtained in a surface-illuminated IPE-based Si PD around 1550 nm. Finally, device capacitance measurements have been carried out demonstrating a capacitance < 5 pF which has the potential for GHz operation subject to a reduction of the series resistance of the ohmic contact.

MeSH terms

  • Equipment Design
  • Equipment Failure Analysis
  • Interferometry / instrumentation*
  • Miniaturization
  • Photometry / instrumentation*
  • Semiconductors*
  • Silicon / chemistry*

Substances

  • Silicon