Open foundry platform for high-performance electronic-photonic integration

Opt Express. 2012 May 21;20(11):12222-32. doi: 10.1364/OE.20.012222.

Abstract

This paper presents photonic devices with 3 dB/cm waveguide loss fabricated in an existing commercial electronic 45 nm SOI-CMOS foundry process. By utilizing existing front-end fabrication processes the photonic devices are monolithically integrated with electronics in the same physical device layer as transistors achieving 4 ps logic stage delay, without degradation in transistor performance. We demonstrate an 8-channel optical microring-resonator filter bank and optical modulators, both controlled by integrated digital circuits. By developing a device design methodology that requires zero process infrastructure changes, a widely available platform for high-performance photonic-electronic integrated circuits is enabled.

Publication types

  • Research Support, Non-U.S. Gov't
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Electronics / instrumentation*
  • Equipment Design
  • Equipment Failure Analysis
  • Optical Devices*
  • Systems Integration
  • Transistors, Electronic*