Ultralow-loss, high-density SOI optical waveguide routing for macrochip interconnects

Opt Express. 2012 May 21;20(11):12035-9. doi: 10.1364/OE.20.012035.

Abstract

We report optical waveguides up to one meter long with 0.026 dB/cm loss fabricated in a 300nm thick SOI CMOS process. Combined with tight bends and compact interlayer grating couplers, we demonstrate a complete toolbox for ultralow-loss, high-density waveguide routing for macrochip interconnects.

Publication types

  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Equipment Design
  • Equipment Failure Analysis
  • Semiconductors*
  • Surface Plasmon Resonance / instrumentation*
  • Telecommunications / instrumentation*