Selective and reversible ammonia gas detection with nanoporous film functionalized silicon photonic micro-ring resonator

Opt Express. 2012 May 21;20(11):11855-62. doi: 10.1364/OE.20.011855.

Abstract

Portable, low cost and real-time gas sensors have a considerable potential in various biomedical and industrial applications. For such applications, nano-photonic gas sensors based on standard silicon fabrication technology offer attractive opportunities. Deposition of high surface area nano-porous coatings on silicon photonic sensors is a means to achieve selective, highly sensitive and multiplexed gas detection on an optical chip. Here we demonstrate selective and reversible ammonia gas detection with functionalized silicon-on-insulator optical micro-ring resonators. The micro-ring resonators are coated with acidic nano-porous aluminosilicate films for specific ammonia sensing, which results in a reversible response to NH(3)with selectivity relative to CO(2). The ammonia detection limit is estimated at about 5 ppm. The detectors reach a steady response to NH(3) within 30 and return to their base level within 60 to 90 seconds. The work opens perspectives on development of nano-photonic sensors for real-time, non-invasive, low cost and light weight biomedical and industrial sensing applications.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Ammonia / analysis*
  • Equipment Design
  • Equipment Failure Analysis
  • Gases / analysis*
  • Membranes, Artificial*
  • Miniaturization
  • Nanostructures / chemistry*
  • Nanostructures / ultrastructure
  • Nanotechnology / instrumentation*
  • Photometry / instrumentation*
  • Silicon / chemistry*
  • Transducers

Substances

  • Gases
  • Membranes, Artificial
  • Ammonia
  • Silicon