Study of evanescently-coupled and grating-assisted GaInAsSb photodiodes integrated on a silicon photonic chip

Opt Express. 2012 May 21;20(11):11665-72. doi: 10.1364/OE.20.011665.

Abstract

In this paper we present GaInAsSb photodiodes heterogeneously integrated on SOI by BCB adhesive bonding for operation in the short-wave infrared wavelength region. Photodiodes using evanescent coupling between the silicon waveguide and the III-V structure are presented, showing a room temperature responsivity of 1.4A/W at 2.3 µm. Photodiode structures using a diffraction grating to couple from the silicon waveguide layer to the integrated photodiode are reported, showing a responsivity of 0.4A/W at 2.2 µm.

MeSH terms

  • Arsenicals / chemistry*
  • Equipment Design
  • Equipment Failure Analysis
  • Gallium / chemistry*
  • Indium / chemistry*
  • Infrared Rays
  • Light
  • Photometry / instrumentation*
  • Refractometry / instrumentation*
  • Scattering, Radiation
  • Semiconductors*
  • Silicon / chemistry*
  • Surface Plasmon Resonance / instrumentation*
  • Systems Integration

Substances

  • Arsenicals
  • Indium
  • gallium arsenide
  • Gallium
  • indium arsenide
  • Silicon