Design and fabrication of a novel prism for micro-optical system

Appl Opt. 2012 Jun 1;51(16):3558-63. doi: 10.1364/AO.51.003558.

Abstract

This study presents a special k-type (45°, 135°) microprism structure design for the lateral-type semiconductor laser of optical systems. This study combines front- and back-side inclined exposure technology to develop a k-type microprism structure and replaces the optical prism manufactured through traditional machine processing or injection molding with a new polymer (thick-film negative photoresists) micro-optical prism structure. To obtain the optimal structural surface roughness (12-15 nm at 400 μm×400 μm area), the percentage of polymer material loss caused by the solvent was controlled. This roughness level meets Blu-ray specifications (λ/10, λ=405 nm).