High-damping carbon nanotube hinged micromirrors

Small. 2012 Jul 9;8(13):2006-10. doi: 10.1002/smll.201102683. Epub 2012 Apr 17.

Abstract

New developments in digital mirror devices (DMDs) require suspension hinges with a good damping and high temperature stability. Carbon nanotubes (CNTs) offer these unique properties. Herein it is shown how CNT hinges can be integrated in micromirrors. The image illustrates a micromirror with a CNT suspension, and a typical overdamped stepresponse (Q-factor < 0.5).

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Nanotechnology / methods*
  • Nanotubes, Carbon / chemistry*

Substances

  • Nanotubes, Carbon