Nano-fabrication with a flexible array of nano-apertures

Nanotechnology. 2012 May 4;23(17):175303. doi: 10.1088/0957-4484/23/17/175303. Epub 2012 Apr 5.

Abstract

We report fabrication and use of a flexible array of nano-apertures for photolithography on curved surfaces. The batch-fabricated apertures are formed of metal-coated silicone tips. The apertures are formed at the end of the silicone tips by either electrochemical etching of the metal or plasma etching of a protective mask followed by wet chemical etching. The apertures are as small as 250 nm on substrates larger than several millimeters. We demonstrate how the nano-aperture array can be used for nano-fabrication on flat and curved substrates, and show the subsequent fabrication steps to form large arrays of sub-micron aluminum dots or vertical silicon wires.

Publication types

  • Research Support, U.S. Gov't, Non-P.H.S.