A wide spectral range single-photon avalanche diode fabricated in an advanced 180 nm CMOS technology

Opt Express. 2012 Mar 12;20(6):5849-57. doi: 10.1364/OE.20.005849.

Abstract

We present a single-photon avalanche diode (SPAD) with a wide spectral range fabricated in an advanced 180 nm CMOS process. The realized SPAD achieves 20 % photon detection probability (PDP) for wavelengths ranging from 440 nm to 820 nm at an excess bias of 4 V, with 30 % PDP at wavelengths from 520 nm to 720 nm. Dark count rates (DCR) are at most 5 kHz, which is 30 Hz/μm2, at an excess bias of 4V when we measure 10 μm diameter active area structure. Afterpulsing probability, timing jitter, and temperature effects on DCR are also presented.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Equipment Design
  • Equipment Failure Analysis
  • Pattern Recognition, Automated / methods*
  • Photometry / instrumentation*
  • Photons
  • Semiconductors*