Self-calibrated humidity sensor in CMOS without post-processing

Sensors (Basel). 2012;12(1):226-32. doi: 10.3390/s120100226. Epub 2011 Dec 27.

Abstract

A 1.1 μW power dissipation, voltage-output humidity sensor with 10% relative humidity accuracy was developed in the LFoundry 0.15 μm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a humidity-sensitive layer of Intervia Photodielectric 8023D-10, a CMOS capacitance to voltage converter, and the self-calibration circuitry.

Keywords: CMOS integrated circuits; capacitive sensors; humidity measurement; microsensors.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Calibration
  • Computer Simulation
  • Electricity
  • Electronics
  • Humidity*
  • Metals / chemistry*
  • Oxides / chemistry*
  • Semiconductors / instrumentation*
  • Temperature

Substances

  • Metals
  • Oxides