ZnO tetrapods (ZnO-Ts) were synthesized in a vertical flow reactor by gas phase oxidation of Zn vapor in an air atmosphere. The morphology of the product was varied from nearly spherical nanoparticles to ZnO-Ts, together with the partial pressure of Zn and reaction temperature. MgO introduced during synthesis, increased the band gap, the optical transparency in the visible range, and also changed the ZnO-T structure. Fabricated flexible transparent UV sensors showed a 45-fold current increase under UV irradiation with an intensity of 30 μW cm(-2) at a wavelength of 365 nm and response time of 0.9 s.