Fast and controllable fabrication of suspended graphene nanopore devices

Nanotechnology. 2012 Mar 2;23(8):085301. doi: 10.1088/0957-4484/23/8/085301. Epub 2012 Feb 1.

Abstract

A poly(methyl methacrylate) assisted dry transfer method was developed to transfer graphene microflake onto a suspended SiN chip in an effective and efficient way for further graphene nanopore drilling for DNA analysis. Graphene microflakes can be patterned by e-beam lithography to a designed shape and size on a large scale of a few thousands simultaneously. Subsequently, individual graphene microflakes can be picked up and transferred to a target hole on a suspended SiN membrane with 1 µm precision via a site-specific transfer-printing method. Nanopores with different diameters from 3 to 20 nm were drilled on the as-transferred graphene membrane in a transmission electron microscope. This method offers a fast and controllable way to fabricate graphene nanopores for DNA analyses.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Crystallization / methods*
  • Graphite / chemistry*
  • Macromolecular Substances / chemistry
  • Materials Testing
  • Molecular Conformation
  • Nanostructures / chemistry*
  • Nanostructures / ultrastructure*
  • Particle Size
  • Porosity
  • Surface Properties

Substances

  • Macromolecular Substances
  • Graphite