Effect of plasma treatment on the gas sensor with single-walled carbon nanotube paste

Abstract

The effect of plasma treatment on the gas sensing properties of screen-printed single-walled carbon nanotube (SWCNT) pastes is reported. The gas sensors, using SWCNT pastes as a sensing material, were fabricated by photolithography and screen printing. The SWCNT pastes were deposited between interdigitated electrodes on heater membrane by screen printing. In order to functionalize the pastes, they were plasma treated using several gases which produce defects caused by reactive ion etching. The Ar and O(2) plasma-treated SWCNT pastes exhibited a large response to NO(2) exposure and the fluorinated gas, such as CF(4) and SF(6), plasma-treated SWCNT pastes exhibited a large response to NH(3) exposure.