Optical characterization and reverse engineering based on multiangle spectroscopy

Alexander V Tikhonravov; Tatiana V Amotchkina; Michael K Trubetskov; Robert J Francis; Vesna Janicki; Jordi Sancho-Parramon; Hrvoje Zorc; Vladimir Pervak

doi:10.1364/ao.51.000245

Optical characterization and reverse engineering based on multiangle spectroscopy

Appl Opt. 2012 Jan 10;51(2):245-54. doi: 10.1364/ao.51.000245.

Authors

Alexander V Tikhonravov¹, Tatiana V Amotchkina, Michael K Trubetskov, Robert J Francis, Vesna Janicki, Jordi Sancho-Parramon, Hrvoje Zorc, Vladimir Pervak

Affiliation

¹ Research Computing Center, Moscow State University, Leninskie Gory, 119992, Moscow, Russia. tikh@srcc.msu.ru

PMID: 22270522
DOI: 10.1364/ao.51.000245

Abstract

We perform characterization of thin films and reverse engineering of multilayer coatings on the basis of multiangle spectral photometric data provided by a new advanced spectrophotometer accessory. Experimental samples of single thin films and multilayer coatings are produced by magnetron sputtering and electron-beam evaporation. Reflectance and transmittance data at two polarization states are measured at incidence angles from 7 to 40 deg. We demonstrate that multiangle reflectance and transmittance data provide reliable characterization and reverse-engineering results.