Cu nanoparticles with vaporized self-assembled monolayers (SAMs) for the prevention of oxidation were synthesized via inert-gas condensation (IGC). When processing the nanoparticles, the convection in the vacuum chamber was controlled using carrier gases such as Ar and He. Cu shots (2-8 mm) were used as raw materials and were evaporated via resistance heating. Octanethiol (CH3(CH2)7SH) was used for the SAMs and was introduced with the carrier gases during the process. The prepared samples were examined via scanning electron microscopy (SEM) and transmission electron microscopy (TEM) to determine the particle sizes, the coating thicknesses of the SAMs, and the particle distribution states. The ingredients were confirmed via X-ray photoelectron spectroscopy (XPS) and energy-dispersive spectroscopy (EDS). The particle size and morphology were controlled by introducing various combinations of carrier gases, such as He, Ar and H2. Finally, stabilized Cu nanoparticles stably coated with octanethiol were successfully fabricated.