Thin films of thermochromic vanadium dioxide have been deposited on glass substrates at 530 degrees C from the aerosol assisted chemical vapour deposition of vanadyl acetylacetonate solutions in ethanol under the influence of electric fields. Electric fields were generated by applying a potential difference between the top plate and the substrate of the reactor. The deposited films were analysed and characterised using scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy, Raman spectroscopy and variable temperature UV/Visible spectroscopy. The application of an electric field led to significant changes in the deposited films microstructure and functional properties. It was found that an increase in electric field strength caused a decrease in crystallite size and in an increase in the change in transmission in the near infrared when compared to films grown without the use of an electric field.