Full-field microimaging with 8 keV X-rays achieves a spatial resolutions better than 20 nm

Opt Express. 2011 Oct 10;19(21):19919-24. doi: 10.1364/OE.19.019919.

Abstract

Fresnel zone plates (450 nm thick Au, 25 nm outermost zone width) used as objective lenses in a full field transmission reached a spatial resolution better than 20 nm and 1.5% efficiency with 8 keV photons. Zernike phase contrast was also realized without compromising the resolution. These are very significant achievements in the rapid progress of high-aspect-ratio zone plate fabrication by combined electron beam lithography and electrodeposition.

Publication types

  • Research Support, Non-U.S. Gov't
  • Research Support, U.S. Gov't, Non-P.H.S.

MeSH terms

  • Electrochemistry / methods
  • Electrons
  • Equipment Design
  • Gold / chemistry
  • Lenses
  • Metal Nanoparticles / chemistry
  • Microscopy, Electron, Transmission / methods
  • Microscopy, Phase-Contrast / methods*
  • Optical Devices
  • Optics and Photonics / methods
  • Photons
  • X-Rays

Substances

  • Gold