SU8 3D prisms with ultra small inclined angle for low-insertion-loss fiber/waveguide interconnection

Opt Express. 2011 Sep 26;19(20):18956-64. doi: 10.1364/OE.19.018956.

Abstract

This paper presents a simple method for fabricating SU8 three dimensional (3D) prisms with very small inclined-angles for optical-fiber/planar-waveguide interconnection with low insertion-loss by combining self-filling, molding and nano-lithography processes on plane surface. The prisms possess ultra low 3D inclined angle of 0.6° and a small surface roughness of 3.5 nm. It is demonstrated that the transmission efficiency of SOI waveguides improved about 4.6 times at the presence of SU8 prisms with a coupling loss of 11 dB per taper and radiation loss of 2.4 dB per taper.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Computer Simulation*
  • Computer-Aided Design
  • Equipment Design
  • Light*
  • Models, Theoretical*
  • Optical Fibers*
  • Scattering, Radiation*