X-ray beam induced current method at the laboratory x-ray source

R R Fahrtdinov; O V Feklisova; M V Grigoriev; D V Irzhak; D V Roshchupkin; E B Yakimov

doi:10.1063/1.3633948

X-ray beam induced current method at the laboratory x-ray source

Rev Sci Instrum. 2011 Sep;82(9):093702. doi: 10.1063/1.3633948.

Authors

R R Fahrtdinov¹, O V Feklisova, M V Grigoriev, D V Irzhak, D V Roshchupkin, E B Yakimov

Affiliation

¹ Institution of Russian Academy of Sciences, Institute of Microelectronics Technology, and High-Purity Materials RAS, Chernogolovka 142432 Russia.

PMID: 21974589
DOI: 10.1063/1.3633948

Abstract

The x-ray beam induced current method (XBIC) is realized on the laboratory x-ray source using the polycapillary x-ray optics. It is shown that rather good images of grain boundaries in Si can be obtained by this method. The parameters of x-ray beam are estimated by the simulation of Schottky diode image. A good correlation between the experimental and calculated grain boundary XBIC contrast is obtained. The possibilities of laboratory source based XBIC method are estimated.