Preparation of clean monodisperse samples of clusters and nanoparticles for characterization using cutting-edge analytical techniques is essential to understanding their size-dependent properties. Herein, we report a general method for the preparation of high surface coverage samples of monodisperse clusters containing an exact number of atoms. Polydisperse solutions of diphosphine-capped gold clusters were produced by reduction synthesis. Electrospray ionization was used to introduce the clusters into the gas phase where they were filtered by mass-to-charge ratio allowing clusters of a selected size to be deposited onto carbon coated copper grids at well controlled kinetic energies. Scanning transmission electron microscopy (STEM) analysis of the soft landed clusters confirms their monodispersity and high coverage on the substrate. The soft landing approach may be extended to other materials compatible with an array of available ionization techniques and, therefore, has widespread utility as a means for controlled preparation of monodisperse samples of nanoparticles and clusters for analysis by transmission electron microscopy (TEM).