We report on the micro second harmonic (µ-SH) and micro Raman (µ-Raman) images of ion implanted channel and planar waveguides in KTiOPO4 (KTP) crystals. The μ-SH images reveal that the nonlinear properties in the waveguides have not been deteriorated during the implantation process. This is consistent with the μ-Raman images that evidences that lattice distortions are minimal at waveguide's volume. Both the structural and nonlinear properties of the KTP lattice have been only modified at the end of ions' trajectory, which is in good agreement with the positions with maximum refractive index changes.