We present a systematic study on the effect of oxygen and hydrogen plasma-generated reactive species on the properties of ZnO nanowires. Upon exposure to oxygen plasma, the electrical conductivity of an individual ZnO nanowire decreased with substantial changes in the surface chemistry, indicating a decrease in the number of donor-like defects and an increase in the number of electron-trapping species. In contrast, an individual ZnO nanowire exposed to hydrogen plasma showed a drastic increase in conductivity up to two orders of magnitude due to the incorporated hydrogen acting as a shallow donor inside the ZnO nanowires without a sputtering process.