Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution

Lab Chip. 2011 Aug 21;11(16):2670-2. doi: 10.1039/c1lc20103d. Epub 2011 Jul 11.

Abstract

Water vapor sensing characterization of a metal resonator fabricated with an industrial 0.35 μm CMOS technology is reported. The resonator frequency is ∼13.2 MHz and exhibits a sensitivity magnitude of ∼3.5 kHz per %RH without requiring any additional hygroscopic coating layer. An on-chip integrated oscillator circuit enables an unprecedented resolution of 0.005 %RH.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Humidity
  • Metals / chemistry*
  • Micro-Electrical-Mechanical Systems / instrumentation
  • Micro-Electrical-Mechanical Systems / methods*
  • Nanotechnology / instrumentation
  • Nanotechnology / methods*
  • Volatilization
  • Water / chemistry*

Substances

  • Metals
  • Water