Zinc oxide nanostructured thin films are transparent semiconducting ceramics increasingly used in a wide range of integrated devices. This paper outlines a simple strategy to integrate arrays of zinc oxide nanostructured thin films on elastomeric substrates using templated patterning. The arrays are robust to large uniaxial strains (up to 20% strain), do not fracture, and maintain electrical functionality. The integration of brittle nanostructured semiconducting materials on elastomeric substrates opens promising routes for the manufacture of deformable and stretchable electronics.