Fabrication of phase-change Ge2Sb2Te5 nano-rings

Opt Express. 2011 Jun 20;19(13):12652-7. doi: 10.1364/OE.19.012652.

Abstract

Phase-change material Ge2Sb2Te5 rings with nanometer-scale thickness have been fabricated using the photo-thermal effect of a focused laser beam followed by differential chemical etching. Laser irradiation conditions and etching process parameters are varied to control the geometric characteristics of the rings. We demonstrate the possibility of arranging the rings in specific geometric patterns, and also their release from the original substrate.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Antimony / chemistry*
  • Crystallization / methods
  • Germanium / chemistry*
  • Information Storage and Retrieval / methods
  • Lasers
  • Nanostructures*
  • Nanotechnology / methods*
  • Optics and Photonics / methods*
  • Silicon Dioxide / chemistry
  • Sulfides / chemistry
  • Tellurium / chemistry*
  • Zinc Compounds / chemistry

Substances

  • Sulfides
  • Zinc Compounds
  • Germanium
  • Silicon Dioxide
  • Antimony
  • zinc sulfide
  • Tellurium