We report a facile chemical route for stabilizing a dispersion of carboxylated single-walled carbon nanotubes (SWCNTs) in a ZnO sol. The dispersion is stabilized via capping of the carboxyl groups on the SWCNT surface by a titania layer, which was confirmed by Fourier transform infrared spectroscopy and transmission electron microscopy. We also demonstrate that the conductivity of the films prepared from the SWCNT/TiO(x)/ZnO sol is dramatically enhanced by thermal treatment and that the thermal stability of the hybridized films with the ZnO sol is notably improved relative to that of a pristine SWCNT film. The structural and chemical changes of the fabricated films were characterized by Raman spectroscopy. As one application, it was presented that thermally treated SWCNT/TiO(x)/ZnO hybrid thin film sensors showed hydrogen sensing characteristics even at room temperature.