Temperature-dependent evolution of the wetting layer thickness during Ge deposition on Si(001)

Nanotechnology. 2011 Jul 15;22(28):285704. doi: 10.1088/0957-4484/22/28/285704. Epub 2011 Jun 7.

Abstract

The evolution of the wetting layer (WL) thickness during Ge deposition on Si(001) is analyzed with the help of a rate-equation approach. The combined role of thickness, island volume and shape-dependent chemical potentials is considered. Several experimental observations, such as WL thinning following the pyramid-to-dome transformation, are captured by the model, as directly demonstrated by a close comparison with photoluminescence measurements (PL) on samples grown at three different temperatures. The limitations of the model in describing late stages of growth are critically addressed.

Publication types

  • Research Support, Non-U.S. Gov't