Note: Design of transverse electron gun for electron beam based reactive evaporation system

Rev Sci Instrum. 2011 May;82(5):056106. doi: 10.1063/1.3597576.

Abstract

In this paper design of a 10 kV, 10 kW transverse electron gun, suitable for reactive evaporation, supported by simulation and modeling, is presented. Simulation of the electron beam trajectory helps in locating the emergence aperture after 90° bend and also in designing the crucible on which the beam is finally incident after 270° bend. The dimension of emergence aperture plays a vital role in designing the differential pumping system between the gun chamber and the substrate chamber. Experimental validation is done for beam trajectory by piercing a stainless steel plate at 90° position which is kept above the crucible.