Design and fabrication of multichannel Si/SiO2 autocloned photonic crystal edge filters

Appl Opt. 2011 Mar 20;50(9):C50-4. doi: 10.1364/AO.50.000C50.

Abstract

An Si/SiO2 multilayer with zigzag layer interfaces is fabricated on a patterned silica substrate using the autocloning method. The multilayer is designed to function as multichannel long-wave pass type edge filters with various cutoff wavelengths. A cutoff wavelength shift of the order of 190 nm in the near infrared region (1300-1500 nm) is experimentally demonstrated.