Large-aperture plasma-assisted deposition of inertial confinement fusion laser coatings

James B Oliver; Pete Kupinski; Amy L Rigatti; Ansgar W Schmid; John C Lambropoulos; Semyon Papernov; Alexei Kozlov; John Spaulding; Daniel Sadowski; Z Roman Chrzan; Robert D Hand; Desmond R Gibson; Ian Brinkley; Frank Placido

doi:10.1364/AO.50.000C19

Large-aperture plasma-assisted deposition of inertial confinement fusion laser coatings

Appl Opt. 2011 Mar 20;50(9):C19-26. doi: 10.1364/AO.50.000C19.

Authors

James B Oliver¹, Pete Kupinski, Amy L Rigatti, Ansgar W Schmid, John C Lambropoulos, Semyon Papernov, Alexei Kozlov, John Spaulding, Daniel Sadowski, Z Roman Chrzan, Robert D Hand, Desmond R Gibson, Ian Brinkley, Frank Placido

Affiliation

¹ Laboratory for Laser Energetics, University of Rochester, Rochester, New York 14623-1299, USA. joli@lle.rochester.edu

PMID: 21460937
DOI: 10.1364/AO.50.000C19

Abstract

Plasma-assisted electron-beam evaporation leads to changes in the crystallinity, density, and stresses of thin films. A dual-source plasma system provides stress control of large-aperture, high-fluence coatings used in vacuum for substrates 1m in aperture.