Nanoscale two-bit/cell NAND silicon-oxide-nitride-oxide-silicon devices with a separated double-gate saddle-type structure

J Nanosci Nanotechnol. 2011 Feb;11(2):1337-41. doi: 10.1166/jnn.2011.3373.

Abstract

Nanoscale two-bit/cell NAND silicon-oxide-nitride-oxide-silicon flash memory devices based on a separated double-gate (SDG) saddle structure with a recess channel region had two different doping regions in silicon-fin channel to operate two-bit per cell. A simulation results showed that the short channel effect, the cross-talk problem between cells, and the increase in threshold voltage distribution were minimized, resulting in the enhancement of the scaling-down characteristics and the program/erase speed.